The TURBOVAC i / iX series is a modular series of turbomolecular vacuum pumps, which forms a unit with the integrated drive electronics (frequency converter). When developing the TURBOVAC i / iX, great importance was placed on the maximum achievable pump performance in relation to the installation size. The specially developed rotor/stator design guarantees excellent performance data in terms of pumping speed, gas throughput and compression, even for light gases. The bearings on all pumps consist of a wear-free permanent magnet bearing on the high vacuum side and a life-time lubricated, oil-free ceramic ball bearing on the backing vacuum side. This eliminates the need for routine maintenance such as oil changes. The ceramic ball bearing can be replaced on site if necessary. The pumps have a ventilation and sealing gas device as standard for directly connecting the ventilation, sealing gas valve or sealing gas throttle to the pump.
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Variant:
Article number
810031V1000
810041V1000
810031V3300
810041V3300
Product
End pressure
End pressure
Pumping speed
N2: 90 l/sN2: 90 l/sN2: 90 l/sN2: 90 l/s
Pumping speed
Connection flange
Power supply
Feature variant
Connection flange (pressure side)
Connection flange (suction side)
DN 63 ISO-KDN 63 CFDN 63 ISO-KDN 63 CF
Inlet flange / Outlet flange
Lubricants
Valves
Product details
Cooling Method
with integrated frequency converter, RS 485, USB+ and 15-pin digital I/O interfacewith integrated frequency converter, RS 485, USB+ and 15-pin digital I/O interfacewith integrated frequency converter and vacuum system control unit, RS 485, USB+ and 15-pin digital I/O interfacewith integrated frequency converter and vacuum system control unit, RS 485, USB+ and 15-pin digital I/O interface