The TURBOVAC MAG pumps are turbomolecular vacuum pumps with a magnetic rotor bearing, which are designed for the pressure range from 10-1 mbar to 10-10 mbar. The pumping speed for air ranges from 300 l/s (inlet flange diameter = 100 mm) to 2000 l/s (inlet flange diameter = 250 mm). The TURBOVAC MAG pumps are primarily used where noise and vibration-free operation, freedom from hydrocarbons and long maintenance intervals are required. Electron beam microscopy, analysis technology, research and development, as well as large area and flat panel display coating are also important areas of application for these pumps.